Laser and Particle Beams

Regular Papers

Application of high-power ion beams for technology

G.E. Remneva1 and V.A. Shulova2

a1 Nuclear Physics Institute, Tomsk, Russia

a2 Aviation Institute, Moscow, Russia

Abstract

Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

(Received December 03 1991)

(Accepted February 26 1992)