Journal of Fluid Mechanics

Gas flow in micro-channels

John C.  Harley a1, Yufeng  Huang a1, Haim H.  Bau a1 and Jay N.  Zemel a2
a1 Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
a2 Department of Electrical Engineering, University of Pennsylvania, Philadelphia, PA 19104-6315, USA

Article author query
harley jc   [Google Scholar] 
huang y   [Google Scholar] 
bau hh   [Google Scholar] 
zemel jn   [Google Scholar] 


An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 104 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow.

(Received February 18 1993)
(Revised September 2 1994)