Hostname: page-component-7c8c6479df-xxrs7 Total loading time: 0 Render date: 2024-03-28T03:41:34.220Z Has data issue: false hasContentIssue false

Gas flow in micro-channels

Published online by Cambridge University Press:  26 April 2006

John C. Harley
Affiliation:
Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
Yufeng Huang
Affiliation:
Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
Haim H. Bau
Affiliation:
Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
Jay N. Zemel
Affiliation:
Department of Electrical Engineering, University of Pennsylvania, Philadelphia, PA 19104-6315, USA

Abstract

An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 104 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow.

Type
Research Article
Copyright
© 1995 Cambridge University Press

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Albertoni, S., Cercignani, C. & Gotusso, L. 1963 Numerical evaluation of the slip coefficient. Phys. Fluids 6, 993996.Google Scholar
Berg, H. R. van den, Seldam, C. A. Ten & Gulik, P. S. van der 1993a Compressible laminar flow in a capillary. J. Fluid Mech. 246, 120.Google Scholar
Berg, H. R. van den, Seldam, C. A. Ten & Gulik, P. S. van der 1993b Thermal effects in compressible viscous flow in a capillary. Int J. Thermophys. 14, 865892.Google Scholar
Choi, S. B., Barron, R. F. & Warrington, R. O. 1991 Fluid flow and heat transfer in microtubes. In Symposium on Micromechanical Sensors, Actuators, and Systems (ed. D. Cho, R. Warrington Jr, A. Pisano, H. H. Bau, C. Friedrich, J. Jara-Almonte & J. Liburdy), ASME DSC 32, 23134.
Ebert, W. A. & Sparrow, E. M. 1965 Slip flow in rectangular and annular ducts. Trans ASME D: Journal Basic Engng 87, 10181024.Google Scholar
Harley, J. C. 1991 Compressible gas flow in micron and submicron sized channels. MS thesis, Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania.
Harley, J. C. 1993 Compressible gas flow in microchannels and microjets. PhD thesis, Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania.
Jaeger, R. C. 1988 Introduction to Microelectronic Fabrication, vol. 5. Modular Series on Solid State Devices (ed. G. Neudeck & R. Pierret). Addison-Wesley.
Joyce, J. W. 1983 Fluidics: basic components and applications. US Army Electronics Development Command, Harry Diamond Labs Special Report HDL-SR-83-9.
Keenan, J. H. & Neumann, E. P. 1946 Measurements of friction in a pipe for subsonic and supersonic flow of air. J. Appl. Mech. 13 (2), A-91A-100.Google Scholar
Kennard, E. H. 1938 Kinetic Theory of Gases. McGraw-Hill.
Pfahler, J., Harley, J., Bau, H. & Zemel, J. 1991 Gas and liquid flow in small channels. Symp. Micromechanical Sensors, Actuators, and Systems (ed. D. Cho, R. Warrington Jr, A. Pisano, H. Bau, C. Friedrich, J. Jara-Almonte & J. Liburdy), ASME DSC 32, 4960.
Prud'homme, R. K., Chapman, T. W. & Bowen, J. R. 1986 Laminar compressible flow in a tube. Appl. Sci. Res. 43, 6774.Google Scholar
Shah, R. K. & London, A. L. 1978 Laminar Flow Forced Convection in Ducts. Academic.
Shapiro, A. K. 1953 The Dynamics and Thermodynamics of Compressible Fluid Flow, vols 1 and 2. John Wiley.
Shapiro, A. H. & Hawthorne, W. R. 1947 The mechanics and thermodynamics of steady, one-dimensional gas flow. J. Appl. Mech. 14, (4), A-317A-336.Google Scholar
Sreekanth, A. K. 1968 Slip flow through long circular tubes. Rarefied Gas Dynamics (ed. L. Trilling & H. Y. Wachman). Academic Press.
Terry, S., Jerman, J. & Angell, J. 1979 A gas chromatographic air analyzer fabricated on a silicon wafer. IEEE Trans. Electron Devices, ED-26, no. 12, 18801886.Google Scholar
Touloukian, Y. S., Saxena, S. C. & Hestermans, P. 1975 Thermophysical Properties of Matter, vol. 11, IFI/Plenum.
Tuckerman, D. B. 1984 Heat transfer microstructures for integrated circuits. PhD thesis, Department of Electrical Engineering, Stanford University. Also report UCRL 53515, Lawrence Livermore National Laboratory.
Wallis, G. 1970 Direct-current polarization during field-assisted glass–metal sealing. J. Am. Ceramic Soc. 53, 563567.Google Scholar
Wu, P. & Little, W. A. 1983 Measurement of friction factors for the flow of gases in very fine channels used for microminiature Joule–Thomson refrigerators. Cryogenics, May, 273278.