Microscopy and Microanalysis


Special Issue: Nanoscale Characterization Using Atom Probe Field Ion Microscopy

Atom Probe Tomography: A Technique for Nanoscale Characterization


M.K.  Miller  a1 c1 and E.A.  Kenik  a1
a1 Microscopy, Microanalysis, Microstructures Group, Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831-6136, USA

Article author query
miller mk   [PubMed][Google Scholar] 
kenik ea   [PubMed][Google Scholar] 

Abstract

Atom probe tomography is a technique for the nanoscale characterization of microstructural features. Analytical techniques have been developed to estimate the size, composition, and other parameters of features as small as 1 nm from the atom probe tomography data. These methods are outlined and illustrated with examples of yttrium-, titanium-, and oxygen-enriched particles in a mechanically alloyed, oxide-dispersion-strengthened steel.

(Received October 31 2002)
(Accepted February 18 2003)


Key Words: atom probe; microstructural characterization.

Correspondence:
c1 Corresponding author. E-mail: millermk@ornl.gov