Microscopy and Microanalysis

Invited Paper

Advances in Instrumentation and Techniques - 21st Century Scanning Microscopy - Electrons and He Ions

Beam skirting effects on energy deposition profile in VP-SEM

BD Myers a1, Pan a1 and VP Dravid a1
a1 Northwestern University

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008