Microscopy and Microanalysis


Special Issue: Materials Research in an Aberration-Free Environment
REVIEW

Development of Aberration-Corrected Electron Microscopy


David J.  Smith  a1 c1
a1 Department of Physics, Arizona State University, Tempe, Arizona 85287-1504, USA Dedicated to the memory of the late John C. Wheatley

Article author query
smith dj   [PubMed][Google Scholar] 

Abstract

The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-Ångstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.

(Received August 4 2007)
(Accepted August 7 2007)


Key Words: aberration correction; off-axis electron holography; focal-series reconstruction.

Correspondence:
c1 E-mail address: david.smith@asu.edu