Microscopy and Microanalysis

Invited Paper

Advances in Instrumentation and Techniques - FIB Instrumentation and Application Advances for Physical and Biological Sciences

Focused Ion Beam Fabrication of Nanopores in Metal and Dielectric Membranes

Adams a1, Vasile a1, Hodges a1 and Patterson a1
a1 Sandia National Laboratories

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007