Microscopy and Microanalysis

Invited Paper

Advances in Instrumentation and Techniques - Scanning Probe Microscopy for Nanoscale Characterization of Functional Materials and Electronic Devices

Microcharacterization of Semiconductor Device Materials using Kelvin Probe Microscopy

Stevens-Kalceff a1, Sobey a1 and Kruss a1
a1 University of New South Wales,Australia

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007