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Investigation of the Transition from Local Anodic Oxidation to Electrical Breakdown During Nanoscale Atomic Force Microscopy Electric Lithography of Highly Oriented Pyrolytic Graphite

Published online by Cambridge University Press:  05 February 2016

Ye Yang  and
Jun Lin
Ye Yang*
Affiliation:
The College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China
Jun Lin
Affiliation:
The College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China
*
*Corresponding author. yangye0707@shnu.edu.cn
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Abstract

As one of the tip-based top-down nanoscale machining methods, atomic force microscopy (AFM) electric lithography is capable of directly generating flexible nanostructures on conductive or semi-conductive sample surfaces. In this work, distinct fabrication mechanisms and mechanism transition from local anodic oxidation (LAO) to electrical breakdown (BD) in the AFM nanoscale electric lithography of the highly oriented pyrolytic graphite sample surface was studied. We provide direct evidence of the transition process mechanism through the detected current–voltage (I–V) curve. Characteristics of the fabrication results under the LAO, transition, and BD regions involving the oxide growth rate or material removal rate and AFM probe wear are analyzed in detail. These factors are of great significance for improving the machining controllability and expanding its potential applications.

Keywords

AFM nanoscale electric lithographylocal anodic oxidationelectrical breakdowntip-based nanofabricationnanofabrication of graphite
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 22 , Issue 2 , April 2016 , pp. 432 - 439
Copyright
© Microscopy Society of America 2016 

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