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A study on thick coatings of tetrahedral amorphous carbon deposited by filtered cathode vacuum arc plasma

Published online by Cambridge University Press:  01 April 2016

Young-Jun Jang ,
Gi Taek Kim ,
Yong-Jin Kang ,
Dong-Sik Kim  and
Jong-Kuk Kim
Young-Jun Jang
Affiliation:
Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea
Gi Taek Kim
Affiliation:
Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea
Yong-Jin Kang
Affiliation:
Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea
Dong-Sik Kim
Affiliation:
Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea
Jong-Kuk Kim*
Affiliation:
Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea
*
a)Address all correspondence to this author. e-mail: kjongk@kims.re.kr
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Abstract

Thick coatings of tetrahedral amorphous carbon (ta-C) have great existing and potential commercial importance for components such as automobile accessories. We confirmed the feasibility of depositing thick ta-C coating on Si wafer, WC, stainless steel (STS), and Al alloy substrates by a home-made filtered cathode vacuum arc. A ta-C coating of 800 nm thickness was successfully deposited over 20 min continuous coating. Interestingly, coatings with thicknesses exceeding 1 μm were easily delaminated by thermal and internal stress effects when the coating time exceeded 20 min. Varying the bias (0 V ↔ 500 V) was highly effective in controlling the internal stress relaxation of the ta-C. This method showed significant improvements in the stress relaxation of the ta-C coatings. By applying multicycle coating, the thickness and hardness of the ta-C coating could reach 9.3 μm and 45 GPa, respectively, at a coating speed of 3.0 μm/h on a fixed substrate.

Keywords

plasma depositioncoating
Type
Invited Articles
Information
Journal of Materials Research , Volume 31 , Issue 13: Focus Issue: Advances and Challenges in Carbon-based Tribomaterials , 14 July 2016 , pp. 1957 - 1963
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Copyright
Copyright © Materials Research Society 2016 

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