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Engineered large area fabrication of ordered InGaAs-GaAs nanotube arrays

Published online by Cambridge University Press:  01 February 2011

Ik Su Chun ,
Varun B Verma  and
Xiuling Li
Ik Su Chun
Affiliation:
University of Illinois at Urbana-Champaign, Department of Electrical and Computer Engineering, 2262 micro and nanotechnology Laboratory, MC-249 208 north wright street, Urbana, IL, 61801, United States
Varun B Verma
Affiliation:
verma@uiuc.edu, University of Illinois at Urbana-Champaign, Department of Electrical and Computer Engineering, Urbana, IL, 61801, United States
Xiuling Li
Affiliation:
xiuling@uiuc.edu, University of Illinois at Urbana-Champaign, Department of Electrical and Computer Engineering, Urbana, IL, 61801, United States
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Abstract

Strain induced self-rolling semiconductor micro and nanotubes and related structures represent a new class of building blocks of nanotechnology. They are formed when strained planar bilayers are released from the substrate by selectively removing the sacrificial layer. Compared to other nanotechnology building blocks, one of the main advantages is the precise positioning capability due to top down fabrication approach. In this article, we demonstrate the fabrication of perfectly aligned arrays of InGaAs/GaAs nanotubes and the dispersion of freestanding semiconductor nanotubes into solution and onto foreign substrates. In addition, we systematically investigate the crystal orientation dependence of the rolling direction by using a wheel configuration. Other aspects of formation process are also discussed.

Keywords

III-Vsemiconductingnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1057: Symposium II – Nanotubes and Related Nanostructures , 2007 , 1057-II05-40
Copyright
Copyright © Materials Research Society 2008

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References

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