Microscopy and Microanalysis

Microscopy and Microanalysis (2007), 13:104-105 Cambridge University Press
Copyright © 2007 Microscopy Society of America

Invited Paper

Instrumentation and Methods - Specimen Preparation Techniques

FIB Preparation of Holes with Large Aspect Ratio

Thomas a1, Wendrock a1, Arnold a1 and Lohse a1
a1 IFW Dresden,Germany

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007