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D-STEM: A Parallel Electron Diffraction Technique Applied to Nanomaterials

Published online by Cambridge University Press:  31 August 2010

K.J. Ganesh ,
M. Kawasaki ,
J.P. Zhou  and
P.J. Ferreira
K.J. Ganesh
Affiliation:
Materials Science and Engineering, The University of Texas at Austin, 1 University Station, C2200, Austin, TX 78712, USA
M. Kawasaki
Affiliation:
JEOL, USA Inc., 11 Dearborn Rd., Peabody, MA 01960, USA
J.P. Zhou
Affiliation:
Materials Science and Engineering, The University of Texas at Austin, 1 University Station, C2200, Austin, TX 78712, USA
P.J. Ferreira*
Affiliation:
Materials Science and Engineering, The University of Texas at Austin, 1 University Station, C2200, Austin, TX 78712, USA
*
Corresponding author. E-mail: ferreira@mail.utexas.edu
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Abstract

An electron diffraction technique called D-STEM has been developed in a transmission electron microscopy/scanning transmission electron microscopy (TEM/STEM) instrument to obtain spot electron diffraction patterns from nanostructures, as small as ∼3 nm. The electron ray path achieved by configuring the pre- and postspecimen illumination lenses enables the formation of a 1–2 nm near-parallel probe, which is used to obtain bright-field/dark-field STEM images. Under these conditions, the beam can be controlled and accurately positioned on the STEM image, at the nanostructure of interest, while sharp spot diffraction patterns can be simultaneously recorded on the charge-coupled device camera. When integrated with softwares such as GatanTM STEM diffraction imaging and Automated Crystallography for TEM or DigistarTM, NanoMEGAS, the D-STEM technique is very powerful for obtaining automated orientation and phase maps based on diffraction information acquired on a pixel by pixel basis. The versatility of the D-STEM technique is demonstrated by applying this technique to nanoparticles, nanowires, and nano interconnect structures.

Keywords

parallel electron diffractionnanobeamTEM/STEMnanoparticlesnanowiresspot diffraction patterns
Type
STEM Development and Applications
Information
Microscopy and Microanalysis , Volume 16 , Issue 5 , October 2010 , pp. 614 - 621
Copyright
Copyright © Microscopy Society of America 2010

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