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ON ENABLING NANOCRYSTALLINE DIAMOND FOR DEVICE USE: NOVEL ION BEAM METHODOLOGY AND THE REALIZATION OF SHALLOW N-TYPE DIAMOND

Published online by Cambridge University Press:  21 February 2013

A.H. Khan*
Affiliation:
AKHAN Technologies, Inc., Argonne National Laboratory, IL, USA
A.V. Sumant
Affiliation:
Center for Nanoscale Materials, Argonne National Laboratory, IL, USA
*
*Presenting Author
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Abstract

Despite the many superior attributes of diamond, electronic device performance to date has fallen well behind theoretical expectation. The potential realization of highly efficient electronic polycrystalline diamond devices has been more than limited by certain technological challenges such as maintaining efficient/shallow n-type doping without higher density of defects or incorporation of sp2 bonded carbon as a result of doping(during ion implantation process). Specific n-type diamond reports demonstrating phosphorus doping (with activation energy reported in the range of 485 meV to 600 meV in (100) oriented systems have been particularly problematic as a lower solubility is found as compared to (111) oriented synthesis efforts, in addition to the reported self-compensating nature. Amongst the previous reports of Phosphorus-doped diamond nearly all experimental reports to date show visual crystallographic dislocation/pitting on the (100) facet with even moderate doping where dislocations have been observed to be incorporated into the bulk volume during growth. These dislocations, which are known carrier scattering sites, subsequently lower mobility rendering poor conductance and high resistivity. Due to this well-known sensitivity of phosphorus incorporation to the crystal quality, typically lower in polycrystalline than homoepitaxial films, polycrystalline-based experimental reports have been largely absent. With respect to Phosphorus in-situ doping based efforts, rendered films demonstrate both the visually identifiable pitting and electronically identifiable poor conduction characteristic, and with respect to ion beam doping efforts, complete graphitic flaking at even moderate doses (i.e. greater than 3x1017cm−3). Motivated by these shortcomings and the success of recent experimentation, we present the methodology and data from our recent successful fabrication of polycrystalline diamond P+-i-N junction (diode) with high crystal quality, high power handling capability, high current density, low threshold voltage, and ohmic contact, under room temperature operation, previously undemonstrated across all diamond material types. The superior electrical performance of the device was obtained by novel ion beam methodology designed to resolve previously unaddressed issues relating to n-type doping of diamond materials. A high current density of approximately 104 A/cm2 is attained at 20V forward bias.

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Articles
Copyright
Copyright © Materials Research Society 2013 

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References

Okushi, H., Phys. Stat. Sol.(a) 203, No. 13, 32263244 (2006)CrossRefGoogle Scholar
Koizumi, S., Phys. Stat. Sol.(a) 172, No. 21, 171178 (1999)Google Scholar
Casanova, N. et al. . Phys. Stat. Sol.(a) 181, 510 (2000)10.1002/1521-396X(200009)181:1<5::AID-PSSA5>3.0.CO;2-F3.0.CO;2-F>CrossRef3.0.CO;2-F>Google Scholar
Kato, H. et al. , Mater. Res. Soc. Symp., Proc. Vol. 1039 (2008)Google Scholar
Kato, H. et al. , Dia. Rel. Mat. 16 (2007)Google Scholar
Koizumi, S. et al. ., Appl. Phys. Lett. 71, 1065 (1997)CrossRefGoogle Scholar
Yan, Y. et al. . Phys. Rev. B. Vol. 66, No. 68 (2002)Google Scholar
Khan, A. “Diamond Semiconductor System and Method”, Patent US13/273,467 (2011) Google Scholar
Khan, A.H., Sumant, A.V., (2012), “Characterization of Moderately Phosphorus Doped N-type Nanocrystalline Diamond and Related Devices” (Manuscript in Review) Google Scholar
Schwingenschlogl, et al. ., J. Appl. Phys. 110, 056107 (2011)CrossRefGoogle Scholar
Kalish, R., Korean J. Ceram. 2, 188 (1996)Google Scholar
Kalish, R., Carbon 37, 781, (1999)CrossRefGoogle Scholar
Bernholc, J. et al. ., Phys. Rev. Lett. Vol. 61 No.23 (1988)CrossRefGoogle Scholar
Prins, J. F., Phys. Rev. B. Vol. 38, 5576, (1988)CrossRefGoogle Scholar
Dannefaer, S., Iakoubovskii, K., J. Phys. Condens. Matter 20 (2008)CrossRefGoogle Scholar
Kiflawi, I. et al. . Phil. Mag. B 78 (1998)CrossRefGoogle Scholar
Twitchen, D.J. et al. ., J. Phys. C 13. 2045 (2001)Google Scholar
Kiflawi, I., Bruley, J., Diam. Rel. Mater. 9 (2000)10.1016/S0925-9635(99)00265-4CrossRefGoogle Scholar
Makino, T. et al. ., Dia. Rel. Mat. 18 (2009)Google Scholar
Brezeanu, M. et al. ., IET Circ. Dev. Syst., Vol. 1, No.5 (2007)CrossRefGoogle Scholar