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Characterization of Polyimide Thin Films on Metals

Published online by Cambridge University Press:  15 February 2011

Jiong-Ping Lu ,
Pradnya V. Nagarkar ,
David Volfson ,
Klavs F. Jensen  and
Stephen D. Senturia
Jiong-Ping Lu
Affiliation:
Electronics Packaging Program and Departments of Chemical, Electrical, and Materials Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
Pradnya V. Nagarkar
Affiliation:
Electronics Packaging Program and Departments of Chemical, Electrical, and Materials Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
David Volfson
Affiliation:
Electronics Packaging Program and Departments of Chemical, Electrical, and Materials Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
Klavs F. Jensen
Affiliation:
Electronics Packaging Program and Departments of Chemical, Electrical, and Materials Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
Stephen D. Senturia
Affiliation:
Electronics Packaging Program and Departments of Chemical, Electrical, and Materials Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
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Abstract

We describe an approach using thin films on metals as models to study interfacial interactions. Thin films of biphenyl-tetracarboxylic dianhydride (BPDA) - p-phenylene diamine (PPD) based polyimide on Cr and Au surfaces have been investigated using infrared reflection absorption spectroscopy (IRRAS) and x-ray photoelectron spectroscopy (XPS). IRRAS was used for in-situ monitoring of polymer curing processes. Cured polyimide thin films on metals were characterized ex-situ by both XPS and IRRAS. Anhydride was observed to be an intermediate during chemical transformation of polyamic acid to polyimide. Imidization processes were found to be completed after curing at 250°C for thin films. Strong chemical modification of polyimide thin films resulting from interaction with Cr substrates were observed by infrared spectroscopy. These observations were consistent with angle-resolved XPS data showing a different C 1s emission spectrum of polyimide-Cr interfacial region, compared to the polyimide spectrum.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 264: Symposium G – Electronic Packaging Materials Science VI , 1992 , 199
Copyright
Copyright © Materials Research Society 1992

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