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Microhardness Study Of Cathode-Mounted Amorphous Hydrogenated Boron Carbide

Published online by Cambridge University Press:  15 February 2011

Shu-Han Lin ,
Dong Li  and
Bernard J. Feldman
Shu-Han Lin
Affiliation:
Department of Physics and Center for Molecular Electronics, University of Missouri, St. Louis, MO 63121
Dong Li
Affiliation:
Department of Materials Science and Engineering and Center for Engineering Tribology, Northwestern University, Evanston, IL 60208
Bernard J. Feldman
Affiliation:
Department of Physics and Center for Molecular Electronics, University of Missouri, St. Louis, MO 63121
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Abstract

We have grown cathode-mounted amorphous hydrogenated boron carbide thin films by rf plasma decomposition of diborane and methane. The chemical composition, infrared absorption, optical absorption, microhardness and adhesion of these thin films were measured. As a function of increasing diborane concentration in the feedstock, we observe increasing boron and decreasing hydrogen concentrations, increasing infrared absorption at 1300 cm-1 due to boron icosahedra, increasing optical band gaps, dramatically increased microhardness, and increased adhesion to the underlying substrates of these thin films. These results provide evidence that the presence of boron icosahedra increases microhardness, adhesion, and optical band gaps.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 41
Copyright
Copyright © Materials Research Society 1997

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