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A Comparison of Grain Size Measurements in Al-Cu Thin Films: Imaging verses Diffraction Techniques

Published online by Cambridge University Press:  01 August 2002

L.M. Gignac ,
C.E. Murray ,
K.P. Rodbell  and
M. Gribelyuk
L.M. Gignac
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
C.E. Murray
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
K.P. Rodbell
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
M. Gribelyuk
Affiliation:
IBM Microelectronics Division, Hopewell Junction, NY 12533

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 672 - 673
Copyright
Copyright © Microscopy Society of America 2002