Hostname: page-component-8448b6f56d-qsmjn Total loading time: 0 Render date: 2024-04-23T07:20:25.578Z Has data issue: false hasContentIssue false
  • English
  • Français

Optical and tribological properties of heat-treated diamond-like carbon

Published online by Cambridge University Press:  31 January 2011

A. Grill ,
V. Patel  and
B. S. Meyerson
A. Grill
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
V. Patel
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
B. S. Meyerson
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
Get access

Abstract

Diamond-like carbon, or DLC, films, prepared by the rf plasma decomposition of acetylene, have been deposited at substrate temperatures of 100 to 250 °C, with the substrate at a negative bias of 80 V dc. The DLC films have been annealed in vaccum at temperatures up to 600 °C for 3–4 h. The optical properties of the as-deposited and annealed films have been characterized by ellipsometry and Fourier transform infrared spectroscopy. The wear resistance of the thin DLC films and their friction coefficients have been characterized by a specially designed tribotester. The stresses in the films have also been determined. No significant differences were found between the index of refraction and IR absorption spectra of the as-deposited films, or films annealed at up to 390 °C. The DLC films begin losing hydrogen after annealing above 390 °C and only sp2 bond carbon is observed after annealing at 590 °C. The wear behavior of the as-deposited films was identical for all deposition temperatures. DLC films deposited at 250 °C were more stable and could withstand higher annealing temperature than films deposited at lower temperatures, and remained wear resistant after anneling at 390 °C.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2531 - 2537
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Aisenberg, S. and Chabot, R., J. Appl. Phys. 42, 2953 (1971).CrossRefGoogle Scholar
2Angus, J. C., Koidl, P., and Domitz, S., in Plasma Deposited Thin Films, edited by Mort, J. and Jansen, F. (CRC Press Inc., Boca Raton, FL, 1986), p. 89.Google Scholar
3Tsai, Hsia-chu and Bogy, D.B., J. Vac. Sci. Technol. A5, 3287 (1987).CrossRefGoogle Scholar
4Grill, A., Meyerson, B. S., and Patel, V., in Diamond Optics, Proc. SPIE, edited by Feldman, Albert and Holly, Sandor (SPIE, Bellingham, WA, 1989), Vol. 969, p. 52.CrossRefGoogle Scholar
5Angus, John C. and Hayman, Cliff C., Science 241, 913 (1988).CrossRefGoogle Scholar
6Weissmantel, C., in Thin Films From Free Atoms and Molecules, edited by Klabunde, K.J. (Academic Press, New York, 1985), Vol. Part 2C, p. 153.CrossRefGoogle Scholar
7Enke, K., Dimigen, H., and Hubsch, H., Appl. Phys. Lett. 36, 291 (1980).CrossRefGoogle Scholar
8Holland, L. and Osja, S. M., Thin Solid Films 58, 107 (1979).CrossRefGoogle Scholar
9Zelez, J., J. Vac. Sci. Technol. A1, 305 (1983).CrossRefGoogle Scholar
10Weissmantel, C., Bewilogua, K., Breuer, K., Dietrich, D., Ebersbach, U., Erler, H. J., Rau, B., and Reisse, G., Thin Solid Films 96, 31 (1982).CrossRefGoogle Scholar
11Grill, A., Meyerson, B., Patel, V., Reimer, J. A., and Petrich, M. A., J. Appl. Phys. 61 (8), 2874 (1987).CrossRefGoogle Scholar
12Koeppe, P.V., Kapoor, V. J., Mirtich, M. J., Banks, B. A., and Gulino, D. A., J. Vac. Sci. Technol. A3, 2327 (1985).CrossRefGoogle Scholar
13Mirtich, M. J., Swec, D. M., and Angus, J. C., Thin Solid Films 131, 245 (1985).CrossRefGoogle Scholar
14Couderc, P. and Catherine, Y., Thin Solid Films 146, 93 (1987).CrossRefGoogle Scholar
15Meyerson, B. and Smith, F., J. Non-Cryst. Solids 35/36, 435 (1980).CrossRefGoogle Scholar
16Dischler, B., Bubenzer, A., and Koidl, P., Solid State Commun. 48, 105 (1983).CrossRefGoogle Scholar
17Kanazawa, Seiji and Ebihara, Kenji, in Proc. 9th Int. Symp. on Plasma Chemistry, edited by d'Agostino, R. (IUPAC, September 1989), p. 1473.Google Scholar
18Gonzalez-Hernandez, J., Chao, B. S., and Pawlik, D. A., J. Vac. Sci. Technol. A7, 2332 (1989).CrossRefGoogle Scholar
19Grill, A., Meyerson, B., and Patel, V., J. Mater. Res. 3, 214 (1988).CrossRefGoogle Scholar
20Grill, A., Meyerson, B. S., and Patel, V.V., in IBM Report RC 13117 (IBM Research Division, Yorktown Heights, NY, 1987).Google Scholar
21Hamrock, J. and Brewe, D., J. Lubrication Technol. 105, 171 (1983).CrossRefGoogle Scholar
22Moravec, T. J. and Lee, J. C., J. Vac. Sci. Technol. 20, 338 (1982).CrossRefGoogle Scholar
23Bellamy, L. J., The Infra-red Spectra of Complex Molecules (Chapman and Hall, London, 1975), pp. 14, 38, 74.CrossRefGoogle Scholar
24Dischler, B., Sah, R.E., Koidl, P., Fluhr, W., and Wokaun, A., in Proc. 7th Int. Symp. on Plasma Chemistry, edited by Timmermans, C. J. (IUPAC, Eindhoven, July 1985), p. 45.Google Scholar
25Kobeda, E. and Irene, E. A., J. Vac. Sci. Technol. B6, 574 (1988).CrossRefGoogle Scholar
26Brantley, W. A., J. Appl. Phys. 44, 534 (1973).CrossRefGoogle Scholar
27Tsai, C. C., Knights, J. C., Chang, G., and Wacker, B., J. Appl. Phys. 59, 2998 (1986).CrossRefGoogle Scholar