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Application of high-power ion beams for technology

Published online by Cambridge University Press:  09 March 2009

G.E. Remnev
Affiliation:
Nuclear Physics Institute, Tomsk, Russia
V.A. Shulov
Affiliation:
Aviation Institute, Moscow, Russia

Abstract

Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

Type
Regular Papers
Copyright
Copyright © Cambridge University Press 1993

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